Preparation Process and Application of 1-Vinyl-N - (Vinyldimethylsilyl) -1,1-dimethylsilylamine

2023-11-10 16:07:16

Background and Overview [1]
1-Vinyl-N - (Vinyldimethylsilyl) -1,1-dimethylsilylamine, also known as 1,1,3,3-tetramethyl-1,3-divinyldisilazane, is a colorless transparent liquid that can be used in the manufacturing of silicone rubber, silicone colloid, and vinyl silicone resin. As a adhesion promoter for negative photoresist.

Application [3]

CN201110431560.9 provides a method for processing a porous ultra-low dielectric constant layer, which includes: providing a semiconductor device in a reaction chamber, the surface of the semiconductor device having a porous ultra-low dielectric constant layer, the temperature in the reaction chamber being 300-400 ℃, and the pressure being 80-300 bar; Inject a CO2 supercritical fluid solution into the reaction chamber, in which 1-vinyl-N - (vinyldimethylsilyl) -1,1-dimethylsilylamine is dissolved; Contact the solution with the porous ultra-low dielectric constant layer.